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Algoritmi | User | João Carlos Azevedo Gaspar

João Carlos Azevedo Gaspar

João Carlos Azevedo Gaspar

At Algoritmi

Integrated Researcher with PhD

Member of the IE R&D Group

Member of the ESRG R&D Lab

Academic Degree

PhD

Current Position

Other at Outra

Personal Webpage

Personal Email

joao.gaspar@inl.int

Orcid

0000-0002-6358-8951

Researcher ID

I-7148-2015

FCT Public Key

J561458qqAYu

Ciência ID

E517-9CAA-F0F0

Google Scholar

About Me



Hybrid Multisite Silicon Neural Probe with Integrated Flexible Connector for Interchangeable Packaging

Sensors

2021 | journal-article

Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging

2021 | other

High-Performance and Industrially Viable Nanostructured SiOx Layers for Interface Passivation in Thin Film Solar Cells

Solar RRL

2021 | journal-article

Double-layer flexible neuronal probe with closely spaced electrodes for high-density in-vivo brain recordings

2020 | other

A Smart Dental Prosthesis to Restore Dental Proprioceptivity

2020 35th Conference on Design of Circuits and Integrated Systems, DCIS 2020

2020 | conference-paper

An Active Implant to Restore Dental Proprioceptivity

Proceedings - Euromicro Conference on Digital System Design, DSD 2020

2020 | conference-paper

An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum

Journal of Microelectromechanical Systems

2020 | journal-article

An efficient and deterministic photon management using deep subwavelength features

Nano Energy

2020 | journal-article

Design Optimization of a Lorentz Force, Amplitude Modulated, MEMS Space Magnetometer

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2020 | conference-paper

Dissolving microneedles for the delivery of peptides – Towards tolerance-inducing vaccines

International Journal of Pharmaceutics

2020 | journal-article

Efficient light extraction in subwavelength GaAs/AlGaAs nanopillars for nanoscale light-emitting devices

Optics Express

2020 | journal-article

Engineering of 2D transition metal carbides and nitrides MXenes for cancer therapeutics and diagnostics

Journal of Materials Chemistry B

2020 | journal-article

Erratum to: Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution (Nano Research, (2018), 11, 9, (4823-4835), 10.1007/s12274-018-2070-4)

Nano Research

2020 | journal-article

Fabrication and characterization of thin-film silicon resonators on 10 μm-thick polyimide substrates

Journal of Micromechanics and Microengineering

2020 | journal-article

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined with Grayscale Lithography

Journal of Microelectromechanical Systems

2020 | journal-article

Facile synthesis and defect optimization of 2D-layered MoS2 on TiO2 heterostructure for industrial effluent, wastewater treatments

Scientific Reports

2020 | journal-article

Field-effect transistors made of graphene grown on recycled copper foils

Materials Chemistry and Physics

2020 | journal-article

Highly sensitive MEMS frequency modulated accelerometer with small footprint

Sensors and Actuators, A: Physical

2020 | journal-article

Industry 4.0: Real-time monitoring of an injection molding tool for smart predictive maintenance

IEEE International Conference on Emerging Technologies and Factory Automation, ETFA

2020 | conference-paper

Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer

INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

2020 | conference-paper

Opportunities for enhanced omnidirectional broadband absorption of the solar radiation using deep subwavelength structures

Nano Energy

2020 | journal-article

Organ-on-a-Chip: A Preclinical Microfluidic Platform for the Progress of Nanomedicine

Small

2020 | journal-article

Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation

INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

2020 | conference-paper

Surface Texture Detection with a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger

Journal of Microelectromechanical Systems

2020 | journal-article

A Perspective on Microneedle-Based Drug Delivery and Diagnostics in Paediatrics

Journal of Personalized Medicine

2019 | journal-article

Manipulation of Magnetic Beads with Thin Film Microelectromagnet Traps

Micromachines

2019 | journal-article

A morphological and electronic study of ultrathin rear passivated Cu(In,Ga)Se2 solar cells

Thin Solid Films

2019 | journal-article

Automated characterisation and analysis of large arrays of nanostructures fabricated at wafer scale

Precision Engineering

2019 | journal-article

Creative Approaches on Interactive Visualization and Characterization at the Nanoscale

2019 | book-chapter

Fast and efficient microfluidic cell filter for isolation of circulating tumor cells from unprocessed whole blood of colorectal cancer patients

Scientific Reports

2019 | journal-article

Fatigue lifetime prediction of arbitrarily-shaped MEMS structures made of polysilicon thin films

Microsystem Technologies

2019 | journal-article

Hybrid Rigid-Flexible Magnetoresistive Device Based on a Wafer Level Packaging Technology for Micrometric Proximity Measurements

IEEE Sensors Journal

2019 | journal-article

Small Size and Highly Sensitive Differential MEMS Accelerometer Based on Double-Ended Tuning Fork Resonators

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars

Optics InfoBase Conference Papers

2019 | conference-paper

Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars

2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019

2019 | conference-paper

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Resonant Accelerometer based on Double-Ended Tuning Fork and a Force Amplification Mechanism

Proceedings

2018 | journal-article

Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator

Proceedings

2018 | journal-article

High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators

Proceedings

2018 | journal-article

SU-8 Based Waveguide for Optrodes

Proceedings

2018 | journal-article

High-Resolution Seismocardiogram Acquisition and Analysis System

Sensors

2018 | journal-article

3D Magnetic Field Reconstruction Methodology Based on a Scanning Magnetoresistive Probe

Sensors

2018 | journal-article

Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution

Nano Research

2018 | journal-article

Digital platform for Sigma-Delta accelerometer assessment and test

Microsystem Technologies

2018 | journal-article

Efficient light trapping and broadband absorption of the solar spectrum in nanopillar arrays decorated with deep-subwavelength sidewall features

Nanoscale

2018 | journal-article

Highly efficient DNA extraction and purification from olive oil on a washable and reusable miniaturized device

Analytica Chimica Acta

2018 | journal-article

Highly-ordered silicon nanowire arrays for photoelectrochemical hydrogen evolution: An investigation on the effect of wire diameter, length and inter-wire spacing

Sustainable Energy and Fuels

2018 | journal-article

Insulator Materials for Interface Passivation of Cu(In,Ga)Se2 Thin Films

IEEE Journal of Photovoltaics

2018 | journal-article

Ultra-small packaged micro-cooler for medical applications

2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017

2018 | conference-paper

Challenges and trends in magnetic sensor integration with microfluidics for biomedical applications

Journal of Physics D: Applied Physics

2017 | journal-article

Flexible Magnetoresistive Sensors Designed for Conformal Integration

IEEE Transactions on Magnetics

2017 | journal-article

Microneedles with integrated magnetoresistive sensors: A precision tool in biomedical instrumentation

SAS 2017 - 2017 IEEE Sensors Applications Symposium, Proceedings

2017 | conference-paper

Novel magnetic readout for hybrid spintronic MEMS devices

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

2017 | conference-paper

On-Chip Magnetic Nanoparticle Manipulation and Trapping for Biomedical Applications

IEEE Transactions on Magnetics

2017 | journal-article

Towards high-resolution scanning magnetoresistance microscopy

2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

2017 | conference-paper

Ultra-Low Temperature FOWLP Process for the Embedding of Low Thermal Budget Sensors and Components Using SU-8 as Dielectric

Proceedings - Electronic Components and Technology Conference

2017 | conference-paper

Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

Micromachines

2016 | journal-article

Analysis and Characterization of Thermal-Piezoresistive MEMS Resonators

Procedia Engineering

2016 | conference-paper

Digital platform for wafer-level MEMS testing and characterization using electrical response

Sensors (Switzerland)

2016 | journal-article

Embedded Platform for Generic High-order Sigma-delta Accelerometers Testing

Procedia Engineering

2016 | conference-paper

Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control

Sensors and Actuators, A: Physical

2016 | journal-article

Implementing a strategy for on-chip detection of cell-free DNA fragments using GMR sensors: A translational application in cancer diagnostics using ALU elements

Analytical Methods

2016 | journal-article

Low-voltage, High-tuning Range MEMS Variable Capacitor Using Closed-loop Control

Procedia Engineering

2016 | conference-paper

Performance Comparison of Sigma-delta Modulator Architectures for MEMS Accelerometers Using a Fully-Digital Approach

Procedia Engineering

2016 | conference-paper

Amorphous oxygen-rich molybdenum oxysulfide Decorated p-type silicon microwire Arrays for efficient photoelectrochemical water reduction

Nano Energy

2015 | journal-article

Bending Effect on Magnetoresistive Silicon Probes

IEEE Transactions on Magnetics

2015 | journal-article

Bending effect on magnetoresistive silicon probes

2015 IEEE International Magnetics Conference, INTERMAG 2015

2015 | conference-paper

Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2015 | conference-paper

Design, fabrication and test of an integrated multi-microchannel heat sink for electronics cooling

Sensors and Actuators, A: Physical

2015 | journal-article

Embedded MEMS platform for structure test and characterization

Procedia Engineering

2015 | conference-paper

Fabrication and characterization of polymeric three-axis thermal accelerometers

Journal of Micromechanics and Microengineering

2015 | journal-article

Fabrication and mechanical characterization of flexible devices with sensors with magnetoresistance responses above 150%

2015 IEEE International Magnetics Conference, INTERMAG 2015

2015 | conference-paper

High-Resolution MEMS Inclinometer Based on Pull-In Voltage

Journal of Microelectromechanical Systems

2015 | journal-article

High-performance pull-in time accelerometer

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

2015 | conference-paper

Integration of Magnetoresistive Sensors with Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications

IEEE Transactions on Magnetics

2015 | journal-article

Integration of magnetoresistive sensors with atomic force microscopy cantilevers for scanning magnetoresistance microscopy applications

2015 IEEE International Magnetics Conference, INTERMAG 2015

2015 | conference-paper

Real-Time Operation and Characterization of a High-Performance Time-Based Accelerometer

Journal of Microelectromechanical Systems

2015 | journal-article

Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates

Journal of Micromechanics and Microengineering

2015 | journal-article

Full-gap tracking system for parallel-plate electrostatic microactuatores

Procedia Engineering

2014 | conference-paper

Piezoresistor sensor fabrication by direct laser writing on hydrogenated amorphous silicon

Journal of Management and Organization

2014 | journal-article

The use of polymeric technologies for functional 3D Microdevices

Procedia Engineering

2014 | conference-paper

Thermal compensated pull-in voltage MEMS inclinometers

Procedia Engineering

2014 | conference-paper

A fully integrated three-axis thermal accelerometer

Conference Record - IEEE Instrumentation and Measurement Technology Conference

2013 | conference-paper

A prediction scheme of the static fracture strength of MEMS structures based on the characterization of damage distribution on a processed surface

Journal of Micromechanics and Microengineering

2013 | journal-article

High resolution pull-in inclinometer

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

2013 | conference-paper

Integration of TMR sensors in silicon microneedles for magnetic measurements of neurons

IEEE Transactions on Magnetics

2013 | journal-article

Measuring brain activity with magnetoresistive sensors integrated in micromachined probe needles

Applied Physics A: Materials Science and Processing

2013 | journal-article

Sub-micron gap a-Si:H thin film Lamé-mode resonator processed at low temperature on a glass substrate

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

2013 | conference-paper

The effect of eccentricity in the position of UO2 pellets

Progress in Nuclear Energy

2013 | journal-article

FIB preparation and SEM investigations for three-dimensional analysis of cell cultures on microneedle arrays

Scanning

2012 | journal-article

Identification of fatigue crack extension process in zero-tension cyclic stress test of polysilicon films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2012 | conference-paper

Integration of magnetoresistive biochips on a CMOS circuit

IEEE Transactions on Magnetics

2012 | journal-article

Mechanical and piezoresistive properties of thin silicon films deposited by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition at low substrate temperatures

Journal of Applied Physics

2012 | journal-article

Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure

Applied Physics Letters

2012 | journal-article

Statistical characterization of fatigue lifetime of polysilicon thin films

Sensors and Actuators, A: Physical

2012 | journal-article

Effect of humidity and temperature on the fatigue behavior of polysilicon thin film

Sensors and Actuators, A: Physical

2011 | journal-article

Estimation of the parameters determining strength and fatigue behaviors of arbitrarily-shaped polysilicon thin films

ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011

2011 | conference-paper

Finite fatigue lifetime of silicon under inert environment

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2011 | conference-paper

Measurement of nanomicro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry

Optical Engineering

2011 | journal-article

Nonlinear piezoresistance of silicon at large stresses

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2011 | conference-paper

Study of the piezoresistivity of doped nanocrystalline silicon thin films

Journal of Applied Physics

2011 | journal-article

A novel fatigue test with ramping stress amplitude to evaluate fatigue behavior of polysilicon thin films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2010 | conference-paper

A study of prediction of static fracture strength of MEMS structure for strength design scheme

Procedia Engineering

2010 | conference-paper

Accuracy of the fatigue lifetime of polysilicon predicted from its strength distribution

Materials Research Society Symposium Proceedings

2010 | conference-paper

Characterization of ultrathin membranes to enable TEM observation of gas reactions at high pressures

ASME International Mechanical Engineering Congress and Exposition, Proceedings

2010 | conference-paper

Design of experiment characterization of microneedle fabrication processes based on dry silicon etching

Journal of Micromechanics and Microengineering

2010 | journal-article

Development of reference standards for the calibration of optical systems used in the measurement of microcomponents

Strain

2010 | journal-article

Low-frequency two-dimensional resonators for vibrational micro energy harvesting

Journal of Micromechanics and Microengineering

2010 | journal-article

Mechanical properties of thin silicon films deposited at low temperatures by PECVD

Journal of Micromechanics and Microengineering

2010 | journal-article

Nonlinear piezoresistance of silicon

Proceedings of IEEE Sensors

2010 | conference-paper

Out-of-plane electrostatic microactuators with tunable stiffness

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2010 | conference-paper

A 2D electret-based resonant micro energy harvester

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

Calibration of optical systems for the measurement of microcomponents

Optics and Lasers in Engineering

2009 | journal-article

Development of calibration standards for the optical measurement of in-plane displacements of micromechanical components

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

Evaluation of the mechanical properties of aluminum thin films as a function of strain rate using the wafer-scale microtensile technique

Materials Research Society Symposium Proceedings

2009 | conference-paper

Highly efficient extraction of mechanical and linear and quadratic piezoresistive properties of poly-Si films using wafer-scale microtensile testing

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

Hollow microneedle electrode arrays for intracellular recording applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

MEMS calibration standards for the optical measurement of displacements

Fringe 2009 - 6th International Workshop on Advanced Optical Metrology

2009 | conference-paper

Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry

Chinese Optics Letters

2009 | journal-article

Mechanical characterization of CMOS metal layers

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

2009 | conference-paper

Prediction of strength and fatigue lifetime of MEMS structures with arbitrary shapes

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

2009 | conference-paper

Wafer-scale microtensile testing of thin films

Journal of Microelectromechanical Systems

2009 | journal-article

Characterization of the charging and long-term performance of cytop electret layers for MEMS applications

Materials Research Society Symposium Proceedings

2008 | conference-paper

Fracture properties of LPCVD silicon nitride and thermally grown silicon oxide thin films from the load-deflection of long Si3 N4 and SiO2/Si3N4 diaphragms

Journal of Microelectromechanical Systems

2008 | journal-article

High-throughput wafer-scale microtensile testing of thin films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2008 | conference-paper

Intracellular potential measurements of adherently growing cells using micro-needle arrays

12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference

2008 | conference-paper

Mechanical properties and reliability of amorphous vs. poly crystalline silicon thin films

Materials Research Society Symposium Proceedings

2008 | conference-paper

Microneedle arrays for intracellular recording applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2008 | conference-paper

Modeling and improvement of a metallization system subjected to fast temperature cycle stress

EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems

2008 | conference-paper

Prediction of fatigue lifetime based on static strength and crack extension law - Fatigue test of MEMS materials becomes unnecessary

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2008 | conference-paper

Reliability of MEMS materials: Mechanical characterization of thin-films using the wafer scale bulge test and improved microtenslle techniques

Materials Research Society Symposium Proceedings

2008 | conference-paper

Seamless interpretation of the strength and fatigue lifetime of polycrystalline silicon thin films

Journal of Micromechanics and Microengineering

2008 | journal-article

Systematic characterization of DRIE-based fabrication process of silicon microneedles

Materials Research Society Symposium Proceedings

2008 | conference-paper

Advanced silicon microstructures, sensors, and systems

IEEJ Transactions on Electrical and Electronic Engineering

2007 | journal-article

Comparison of improved bulge and microtensile techniques for mechanical thin film characterization -application to polysilicon

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

2007 | conference-paper

Electrostatic transducers for micro energy harvesting based on SOI technology

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

2007 | conference-paper

Mechanical characterization of silicon nitride thin-films using microtensile specimens with integrated 2D diffraction gratings

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2007 | conference-paper

Mechanical characterization of thin-film composites using the load-deflection response of multilayer membranes - Elastic and fracture properties

Materials Research Society Symposium Proceedings

2006 | conference-paper

Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films

Journal of Microelectromechanical Systems

2005 | journal-article

Electrostatically actuated polymer microresonators

Applied Physics Letters

2005 | journal-article

Electrostatically actuated thin-film amorphous silicon microbridge resonators

Journal of Applied Physics

2005 | journal-article

Thin film silicon microbridges for DNA detection

Materials Research Society Symposium Proceedings

2005 | conference-paper

Thin-film paddle microresonators with high quality factors fabricated at temperatures below 110°C

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2005 | conference-paper

Amorphous silicon electrostatic microresonators with high quality factors

Applied Physics Letters

2004 | journal-article

High-Q thin-film silicon resonators processed at temperatures below 110°C on glass and plastic substrates

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2004 | conference-paper

MEMS microresonators based on nanocrystalline silicon

Materials Research Society Symposium Proceedings

2004 | conference-paper

Dissipation mechanisms in thin-film silicon microresonators on glass substrates

Materials Research Society Symposium - Proceedings

2003 | conference-paper

Electrostatic actuation of thin-film microelectromechanical structures

Journal of Applied Physics

2003 | journal-article

Integrated magnetic sensing of electrostatically actuated thin-film microbridges

Journal of Microelectromechanical Systems

2003 | journal-article

Low-temperature thin-film silicon MEMS

Thin Solid Films

2003 | journal-article

Performance of Thin-Film Silicon MEMS Resonators in Vacuum

Materials Research Society Symposium - Proceedings

2003 | conference-paper

Thin-film electrostatic actuators on flexible plastic substrates

Materials Research Society Symposium - Proceedings

2003 | conference-paper

Integrated magnetic sensing of electrostatically actuated thin-film microbridges

Materials Research Society Symposium - Proceedings

2002 | conference-paper

MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets

Digests of the Intermag Conference

2002 | conference-paper

MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets

INTERMAG Europe 2002 - IEEE International Magnetics Conference

2002 | conference-paper

MEMS microbridge vibration monitoring using spin-valve sensors

IEEE Transactions on Magnetics

2002 | journal-article

Microelectromechanical system microbridge deflection monitoring using integrated spin valve sensors and micromagnets

Journal of Applied Physics

2002 | journal-article

Thermal actuation of thin film microelectromechanical structures

Journal of Non-Crystalline Solids

2002 | journal-article

Thin film microelectromechanical systems

Materials Research Society Symposium - Proceedings

2002 | conference-paper

Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: Application to devices and thin-film microelectromechanical systems

Thin Solid Films

2001 | journal-article

Electromechanical properties of amorphous and microcrystalline silicon micromachined structures

Materials Research Society Symposium - Proceedings

2001 | conference-paper

Thin-film microelectromechanical devices on large-area substrates

Solid State Phenomena

2001 | book

Hybrid Multisite Silicon Neural Probe with Integrated Flexible Connector for Interchangeable Packaging

Sensors

2021 | journal-article

Hybrid multisite silicon neural probe with integrated flexible connector for interchangeable packaging

2021 | other

High-Performance and Industrially Viable Nanostructured SiOx Layers for Interface Passivation in Thin Film Solar Cells

Solar RRL

2021 | journal-article

Double-layer flexible neuronal probe with closely spaced electrodes for high-density in-vivo brain recordings

2020 | other

A Smart Dental Prosthesis to Restore Dental Proprioceptivity

2020 35th Conference on Design of Circuits and Integrated Systems, DCIS 2020

2020 | conference-paper

An Active Implant to Restore Dental Proprioceptivity

Proceedings - Euromicro Conference on Digital System Design, DSD 2020

2020 | conference-paper

An Alternative Approach to Investigate V-Shaped Electrothermal Microactuators in Vacuum

Journal of Microelectromechanical Systems

2020 | journal-article

An efficient and deterministic photon management using deep subwavelength features

Nano Energy

2020 | journal-article

Design Optimization of a Lorentz Force, Amplitude Modulated, MEMS Space Magnetometer

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2020 | conference-paper

Dissolving microneedles for the delivery of peptides – Towards tolerance-inducing vaccines

International Journal of Pharmaceutics

2020 | journal-article

Efficient light extraction in subwavelength GaAs/AlGaAs nanopillars for nanoscale light-emitting devices

Optics Express

2020 | journal-article

Engineering of 2D transition metal carbides and nitrides MXenes for cancer therapeutics and diagnostics

Journal of Materials Chemistry B

2020 | journal-article

Erratum to: Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution (Nano Research, (2018), 11, 9, (4823-4835), 10.1007/s12274-018-2070-4)

Nano Research

2020 | journal-article

Fabrication and characterization of thin-film silicon resonators on 10 μm-thick polyimide substrates

Journal of Micromechanics and Microengineering

2020 | journal-article

Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined with Grayscale Lithography

Journal of Microelectromechanical Systems

2020 | journal-article

Facile synthesis and defect optimization of 2D-layered MoS2 on TiO2 heterostructure for industrial effluent, wastewater treatments

Scientific Reports

2020 | journal-article

Field-effect transistors made of graphene grown on recycled copper foils

Materials Chemistry and Physics

2020 | journal-article

Highly sensitive MEMS frequency modulated accelerometer with small footprint

Sensors and Actuators, A: Physical

2020 | journal-article

Industry 4.0: Real-time monitoring of an injection molding tool for smart predictive maintenance

IEEE International Conference on Emerging Technologies and Factory Automation, ETFA

2020 | conference-paper

Influence of Mechanical Stress in a Packaged Frequency-Modulated MEMS Accelerometer

INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

2020 | conference-paper

Opportunities for enhanced omnidirectional broadband absorption of the solar radiation using deep subwavelength structures

Nano Energy

2020 | journal-article

Organ-on-a-Chip: A Preclinical Microfluidic Platform for the Progress of Nanomedicine

Small

2020 | journal-article

Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation

INERTIAL 2020 - 7th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

2020 | conference-paper

Surface Texture Detection with a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger

Journal of Microelectromechanical Systems

2020 | journal-article

A Perspective on Microneedle-Based Drug Delivery and Diagnostics in Paediatrics

Journal of Personalized Medicine

2019 | journal-article

Manipulation of Magnetic Beads with Thin Film Microelectromagnet Traps

Micromachines

2019 | journal-article

A morphological and electronic study of ultrathin rear passivated Cu(In,Ga)Se2 solar cells

Thin Solid Films

2019 | journal-article

Automated characterisation and analysis of large arrays of nanostructures fabricated at wafer scale

Precision Engineering

2019 | journal-article

Creative Approaches on Interactive Visualization and Characterization at the Nanoscale

2019 | book-chapter

Fast and efficient microfluidic cell filter for isolation of circulating tumor cells from unprocessed whole blood of colorectal cancer patients

Scientific Reports

2019 | journal-article

Fatigue lifetime prediction of arbitrarily-shaped MEMS structures made of polysilicon thin films

Microsystem Technologies

2019 | journal-article

Hybrid Rigid-Flexible Magnetoresistive Device Based on a Wafer Level Packaging Technology for Micrometric Proximity Measurements

IEEE Sensors Journal

2019 | journal-article

Small Size and Highly Sensitive Differential MEMS Accelerometer Based on Double-Ended Tuning Fork Resonators

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars

Optics InfoBase Conference Papers

2019 | conference-paper

Strong enhancement of light extraction efficiency in sub-wavelength AlGaAs/GaAs vertical-emitting nanopillars

2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019

2019 | conference-paper

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019 | conference-paper

Resonant Accelerometer based on Double-Ended Tuning Fork and a Force Amplification Mechanism

Proceedings

2018 | journal-article

Frequency Modulated Magnetometer Using a Double-Ended Tuning Fork Resonator

Proceedings

2018 | journal-article

High Frequency FM MEMS Accelerometer Using Piezoresistive Resonators

Proceedings

2018 | journal-article

SU-8 Based Waveguide for Optrodes

Proceedings

2018 | journal-article

High-Resolution Seismocardiogram Acquisition and Analysis System

Sensors

2018 | journal-article

3D Magnetic Field Reconstruction Methodology Based on a Scanning Magnetoresistive Probe

Sensors

2018 | journal-article

Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution

Nano Research

2018 | journal-article

Digital platform for Sigma-Delta accelerometer assessment and test

Microsystem Technologies

2018 | journal-article

Efficient light trapping and broadband absorption of the solar spectrum in nanopillar arrays decorated with deep-subwavelength sidewall features

Nanoscale

2018 | journal-article

Highly efficient DNA extraction and purification from olive oil on a washable and reusable miniaturized device

Analytica Chimica Acta

2018 | journal-article

Highly-ordered silicon nanowire arrays for photoelectrochemical hydrogen evolution: An investigation on the effect of wire diameter, length and inter-wire spacing

Sustainable Energy and Fuels

2018 | journal-article

Insulator Materials for Interface Passivation of Cu(In,Ga)Se2 Thin Films

IEEE Journal of Photovoltaics

2018 | journal-article

Ultra-small packaged micro-cooler for medical applications

2017 IEEE 19th Electronics Packaging Technology Conference, EPTC 2017

2018 | conference-paper

Challenges and trends in magnetic sensor integration with microfluidics for biomedical applications

Journal of Physics D: Applied Physics

2017 | journal-article

Flexible Magnetoresistive Sensors Designed for Conformal Integration

IEEE Transactions on Magnetics

2017 | journal-article

Microneedles with integrated magnetoresistive sensors: A precision tool in biomedical instrumentation

SAS 2017 - 2017 IEEE Sensors Applications Symposium, Proceedings

2017 | conference-paper

Novel magnetic readout for hybrid spintronic MEMS devices

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

2017 | conference-paper

On-Chip Magnetic Nanoparticle Manipulation and Trapping for Biomedical Applications

IEEE Transactions on Magnetics

2017 | journal-article

Towards high-resolution scanning magnetoresistance microscopy

2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017

2017 | conference-paper

Ultra-Low Temperature FOWLP Process for the Embedding of Low Thermal Budget Sensors and Components Using SU-8 as Dielectric

Proceedings - Electronic Components and Technology Conference

2017 | conference-paper

Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields

Micromachines

2016 | journal-article

Analysis and Characterization of Thermal-Piezoresistive MEMS Resonators

Procedia Engineering

2016 | conference-paper

Digital platform for wafer-level MEMS testing and characterization using electrical response

Sensors (Switzerland)

2016 | journal-article

Embedded Platform for Generic High-order Sigma-delta Accelerometers Testing

Procedia Engineering

2016 | conference-paper

Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control

Sensors and Actuators, A: Physical

2016 | journal-article

Implementing a strategy for on-chip detection of cell-free DNA fragments using GMR sensors: A translational application in cancer diagnostics using ALU elements

Analytical Methods

2016 | journal-article

Low-voltage, High-tuning Range MEMS Variable Capacitor Using Closed-loop Control

Procedia Engineering

2016 | conference-paper

Performance Comparison of Sigma-delta Modulator Architectures for MEMS Accelerometers Using a Fully-Digital Approach

Procedia Engineering

2016 | conference-paper

Amorphous oxygen-rich molybdenum oxysulfide Decorated p-type silicon microwire Arrays for efficient photoelectrochemical water reduction

Nano Energy

2015 | journal-article

Bending Effect on Magnetoresistive Silicon Probes

IEEE Transactions on Magnetics

2015 | journal-article

Bending effect on magnetoresistive silicon probes

2015 IEEE International Magnetics Conference, INTERMAG 2015

2015 | conference-paper

Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2015 | conference-paper

Design, fabrication and test of an integrated multi-microchannel heat sink for electronics cooling

Sensors and Actuators, A: Physical

2015 | journal-article

Embedded MEMS platform for structure test and characterization

Procedia Engineering

2015 | conference-paper

Fabrication and characterization of polymeric three-axis thermal accelerometers

Journal of Micromechanics and Microengineering

2015 | journal-article

Fabrication and mechanical characterization of flexible devices with sensors with magnetoresistance responses above 150%

2015 IEEE International Magnetics Conference, INTERMAG 2015

2015 | conference-paper

High-Resolution MEMS Inclinometer Based on Pull-In Voltage

Journal of Microelectromechanical Systems

2015 | journal-article

High-performance pull-in time accelerometer

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

2015 | conference-paper

Integration of Magnetoresistive Sensors with Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications

IEEE Transactions on Magnetics

2015 | journal-article

Integration of magnetoresistive sensors with atomic force microscopy cantilevers for scanning magnetoresistance microscopy applications

2015 IEEE International Magnetics Conference, INTERMAG 2015

2015 | conference-paper

Real-Time Operation and Characterization of a High-Performance Time-Based Accelerometer

Journal of Microelectromechanical Systems

2015 | journal-article

Sub-micron gap in-plane micromechanical resonators based on low-temperature amorphous silicon thin-films on glass substrates

Journal of Micromechanics and Microengineering

2015 | journal-article

Full-gap tracking system for parallel-plate electrostatic microactuatores

Procedia Engineering

2014 | conference-paper

Piezoresistor sensor fabrication by direct laser writing on hydrogenated amorphous silicon

Journal of Management and Organization

2014 | journal-article

The use of polymeric technologies for functional 3D Microdevices

Procedia Engineering

2014 | conference-paper

Thermal compensated pull-in voltage MEMS inclinometers

Procedia Engineering

2014 | conference-paper

A fully integrated three-axis thermal accelerometer

Conference Record - IEEE Instrumentation and Measurement Technology Conference

2013 | conference-paper

A prediction scheme of the static fracture strength of MEMS structures based on the characterization of damage distribution on a processed surface

Journal of Micromechanics and Microengineering

2013 | journal-article

High resolution pull-in inclinometer

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

2013 | conference-paper

Integration of TMR sensors in silicon microneedles for magnetic measurements of neurons

IEEE Transactions on Magnetics

2013 | journal-article

Measuring brain activity with magnetoresistive sensors integrated in micromachined probe needles

Applied Physics A: Materials Science and Processing

2013 | journal-article

Sub-micron gap a-Si:H thin film Lamé-mode resonator processed at low temperature on a glass substrate

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

2013 | conference-paper

The effect of eccentricity in the position of UO2 pellets

Progress in Nuclear Energy

2013 | journal-article

FIB preparation and SEM investigations for three-dimensional analysis of cell cultures on microneedle arrays

Scanning

2012 | journal-article

Identification of fatigue crack extension process in zero-tension cyclic stress test of polysilicon films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2012 | conference-paper

Integration of magnetoresistive biochips on a CMOS circuit

IEEE Transactions on Magnetics

2012 | journal-article

Mechanical and piezoresistive properties of thin silicon films deposited by plasma-enhanced chemical vapor deposition and hot-wire chemical vapor deposition at low substrate temperatures

Journal of Applied Physics

2012 | journal-article

Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure

Applied Physics Letters

2012 | journal-article

Statistical characterization of fatigue lifetime of polysilicon thin films

Sensors and Actuators, A: Physical

2012 | journal-article

Effect of humidity and temperature on the fatigue behavior of polysilicon thin film

Sensors and Actuators, A: Physical

2011 | journal-article

Estimation of the parameters determining strength and fatigue behaviors of arbitrarily-shaped polysilicon thin films

ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, InterPACK 2011

2011 | conference-paper

Finite fatigue lifetime of silicon under inert environment

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2011 | conference-paper

Measurement of nanomicro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry

Optical Engineering

2011 | journal-article

Nonlinear piezoresistance of silicon at large stresses

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2011 | conference-paper

Study of the piezoresistivity of doped nanocrystalline silicon thin films

Journal of Applied Physics

2011 | journal-article

A novel fatigue test with ramping stress amplitude to evaluate fatigue behavior of polysilicon thin films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2010 | conference-paper

A study of prediction of static fracture strength of MEMS structure for strength design scheme

Procedia Engineering

2010 | conference-paper

Accuracy of the fatigue lifetime of polysilicon predicted from its strength distribution

Materials Research Society Symposium Proceedings

2010 | conference-paper

Characterization of ultrathin membranes to enable TEM observation of gas reactions at high pressures

ASME International Mechanical Engineering Congress and Exposition, Proceedings

2010 | conference-paper

Design of experiment characterization of microneedle fabrication processes based on dry silicon etching

Journal of Micromechanics and Microengineering

2010 | journal-article

Development of reference standards for the calibration of optical systems used in the measurement of microcomponents

Strain

2010 | journal-article

Low-frequency two-dimensional resonators for vibrational micro energy harvesting

Journal of Micromechanics and Microengineering

2010 | journal-article

Mechanical properties of thin silicon films deposited at low temperatures by PECVD

Journal of Micromechanics and Microengineering

2010 | journal-article

Nonlinear piezoresistance of silicon

Proceedings of IEEE Sensors

2010 | conference-paper

Out-of-plane electrostatic microactuators with tunable stiffness

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2010 | conference-paper

A 2D electret-based resonant micro energy harvester

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

Calibration of optical systems for the measurement of microcomponents

Optics and Lasers in Engineering

2009 | journal-article

Development of calibration standards for the optical measurement of in-plane displacements of micromechanical components

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

Evaluation of the mechanical properties of aluminum thin films as a function of strain rate using the wafer-scale microtensile technique

Materials Research Society Symposium Proceedings

2009 | conference-paper

Highly efficient extraction of mechanical and linear and quadratic piezoresistive properties of poly-Si films using wafer-scale microtensile testing

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

Hollow microneedle electrode arrays for intracellular recording applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2009 | conference-paper

MEMS calibration standards for the optical measurement of displacements

Fringe 2009 - 6th International Workshop on Advanced Optical Metrology

2009 | conference-paper

Measurement of in-plane deformations of microsystems by digital holography and speckle interferometry

Chinese Optics Letters

2009 | journal-article

Mechanical characterization of CMOS metal layers

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

2009 | conference-paper

Prediction of strength and fatigue lifetime of MEMS structures with arbitrary shapes

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

2009 | conference-paper

Wafer-scale microtensile testing of thin films

Journal of Microelectromechanical Systems

2009 | journal-article

Characterization of the charging and long-term performance of cytop electret layers for MEMS applications

Materials Research Society Symposium Proceedings

2008 | conference-paper

Fracture properties of LPCVD silicon nitride and thermally grown silicon oxide thin films from the load-deflection of long Si3 N4 and SiO2/Si3N4 diaphragms

Journal of Microelectromechanical Systems

2008 | journal-article

High-throughput wafer-scale microtensile testing of thin films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2008 | conference-paper

Intracellular potential measurements of adherently growing cells using micro-needle arrays

12th International Conference on Miniaturized Systems for Chemistry and Life Sciences - The Proceedings of MicroTAS 2008 Conference

2008 | conference-paper

Mechanical properties and reliability of amorphous vs. poly crystalline silicon thin films

Materials Research Society Symposium Proceedings

2008 | conference-paper

Microneedle arrays for intracellular recording applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2008 | conference-paper

Modeling and improvement of a metallization system subjected to fast temperature cycle stress

EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems

2008 | conference-paper

Prediction of fatigue lifetime based on static strength and crack extension law - Fatigue test of MEMS materials becomes unnecessary

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2008 | conference-paper

Reliability of MEMS materials: Mechanical characterization of thin-films using the wafer scale bulge test and improved microtenslle techniques

Materials Research Society Symposium Proceedings

2008 | conference-paper

Seamless interpretation of the strength and fatigue lifetime of polycrystalline silicon thin films

Journal of Micromechanics and Microengineering

2008 | journal-article

Systematic characterization of DRIE-based fabrication process of silicon microneedles

Materials Research Society Symposium Proceedings

2008 | conference-paper

Advanced silicon microstructures, sensors, and systems

IEEJ Transactions on Electrical and Electronic Engineering

2007 | journal-article

Comparison of improved bulge and microtensile techniques for mechanical thin film characterization -application to polysilicon

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

2007 | conference-paper

Electrostatic transducers for micro energy harvesting based on SOI technology

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

2007 | conference-paper

Mechanical characterization of silicon nitride thin-films using microtensile specimens with integrated 2D diffraction gratings

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2007 | conference-paper

Mechanical characterization of thin-film composites using the load-deflection response of multilayer membranes - Elastic and fracture properties

Materials Research Society Symposium Proceedings

2006 | conference-paper

Electrostatic microresonators from doped hydrogenated amorphous and nanocrystalline silicon thin films

Journal of Microelectromechanical Systems

2005 | journal-article

Electrostatically actuated polymer microresonators

Applied Physics Letters

2005 | journal-article

Electrostatically actuated thin-film amorphous silicon microbridge resonators

Journal of Applied Physics

2005 | journal-article

Thin film silicon microbridges for DNA detection

Materials Research Society Symposium Proceedings

2005 | conference-paper

Thin-film paddle microresonators with high quality factors fabricated at temperatures below 110°C

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2005 | conference-paper

Amorphous silicon electrostatic microresonators with high quality factors

Applied Physics Letters

2004 | journal-article

High-Q thin-film silicon resonators processed at temperatures below 110°C on glass and plastic substrates

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2004 | conference-paper

MEMS microresonators based on nanocrystalline silicon

Materials Research Society Symposium Proceedings

2004 | conference-paper

Dissipation mechanisms in thin-film silicon microresonators on glass substrates

Materials Research Society Symposium - Proceedings

2003 | conference-paper

Electrostatic actuation of thin-film microelectromechanical structures

Journal of Applied Physics

2003 | journal-article

Integrated magnetic sensing of electrostatically actuated thin-film microbridges

Journal of Microelectromechanical Systems

2003 | journal-article

Low-temperature thin-film silicon MEMS

Thin Solid Films

2003 | journal-article

Performance of Thin-Film Silicon MEMS Resonators in Vacuum

Materials Research Society Symposium - Proceedings

2003 | conference-paper

Thin-film electrostatic actuators on flexible plastic substrates

Materials Research Society Symposium - Proceedings

2003 | conference-paper

Integrated magnetic sensing of electrostatically actuated thin-film microbridges

Materials Research Society Symposium - Proceedings

2002 | conference-paper

MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets

Digests of the Intermag Conference

2002 | conference-paper

MEMS microbridge deflection monitoring using integrated spin valve sensors and micromagnets

INTERMAG Europe 2002 - IEEE International Magnetics Conference

2002 | conference-paper

MEMS microbridge vibration monitoring using spin-valve sensors

IEEE Transactions on Magnetics

2002 | journal-article

Microelectromechanical system microbridge deflection monitoring using integrated spin valve sensors and micromagnets

Journal of Applied Physics

2002 | journal-article

Thermal actuation of thin film microelectromechanical structures

Journal of Non-Crystalline Solids

2002 | journal-article

Thin film microelectromechanical systems

Materials Research Society Symposium - Proceedings

2002 | conference-paper

Amorphous and microcrystalline silicon deposited by hot-wire chemical vapor deposition at low substrate temperatures: Application to devices and thin-film microelectromechanical systems

Thin Solid Films

2001 | journal-article

Electromechanical properties of amorphous and microcrystalline silicon micromachined structures

Materials Research Society Symposium - Proceedings

2001 | conference-paper

Thin-film microelectromechanical devices on large-area substrates

Solid State Phenomena

2001 | book