Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

By Garcia, I.S.; Moreira, E.E.; DIas, R.A.; Gaspar, J.; Alves, F.S.&s

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

2019

Abstract

No abstract available.

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