Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization

By Moreira, E.E.; Alves, F.S.; Dias, R.A.; Costa, M.; Fonseca, H.; Cabral&a

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2015

Abstract

In this paper, we present a bi-directional extended range parallel-plate electrostatic actuator using feedback linearization control. The actuator can have stable displacements up to 90% of the full-gap (limited by mechanical stoppers) on both directions, i.e., the device can move +/- 2 mu m within a +/- 2.25 mu m gap. The system has successfully tracked references until 1kHz (limited by the dynamics of the device) and it presents a capacitor tuning range of 17, using an actuation voltage from 0 to 10V. The results presented here are a clear advance in respect to the current state-of-the-art in terms of tracking capabilities, total stable displacement and tuning range.

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