Piezoelectric micropump for lab-on-a-chip applications

By Rocha, J.G.; Cardoso, V.; Correia, V.; Lanceros Mendez, S.; Minas, G.

Proceedings of the International Conference on Microelectronics, ICM

2009

Abstract

This paper describes an on-chip pumping system and the correspondent driving circuit. The system can be used in lab-on-a-chip applications for pumping the fluids in the microchannels. The device is constituted by two chips placed together: a CMOS chip with the electronics and a glass chip, with the microchannels and the pumping system. This pumping system, wich is the main subject of the article is based on piezoelectric polymer actuators.

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